Fabrication and Characterization of Superconducting Resonators.

Superconducting microwave resonators are of interest for a wide range of applications, including for their use as microwave kinetic inductance detectors (MKIDs) for the detection of faint astrophysical signatures, as well as for quantum computing applications and materials characterization. In this paper, procedures are presented for the fabrication and characterization of thin-film superconducting microwave resonators. The fabrication methodology allows for the realization of superconducting transmission-line resonators with features on both sides of an atomically smooth single-crystal silicon dielectric.

Analysis and calibration techniques for superconducting resonators.

A method is proposed and experimentally explored for in-situ calibration of complex transmission data for superconducting microwave resonators. This cryogenic calibration method accounts for the instrumental transmission response between the vector network analyzer reference plane and the device calibration plane. Once calibrated, the observed resonator response is analyzed in detail by two approaches.