Micro and Nano Interdigitated Electrode Array (IDEA)-Based MEMS/NEMS as Electrochemical Transducers: A Review.

Micro and nano interdigitated electrode array (µ/n-IDEA) configurations are prominent working electrodes in the fabrication of electrochemical sensors/biosensors, as their design benefits sensor achievement. This paper reviews µ/n-IDEA as working electrodes in four-electrode electrochemical sensors in terms of two-dimensional (2D) planar IDEA and three-dimensional (3D) IDEA configurations using carbon or metal as the starting materials. In this regard, the enhancement of IDEAs-based biosensors focuses on controlling the width and gap measurements between the adjacent fingers and increases the IDEA's height.