Pulsed laser deposited ZnO film on side-polished fiber as a gas sensing element.

A simple sensor element consisting of a side-polished single-mode fiber and a planar metal oxide waveguide is described. The thin ZnO planar waveguide was produced on the polished fiber surface by pulsed laser deposition at optimized processing parameters. A measurement scheme for in situ control of the film thickness during the deposition process was developed and used.