Investigation of the physical, optical, and chemical properties of phase segregated AlCoOx thin films from a novel hexol-type cluster.

The use of a novel inorganic nanoscale cluster (Al[(μ-OH)Co(NH)](NO)) was investigated for its utility as a precursor for AlCoOx films. Mixed-metal aluminum and cobalt oxide thin films were solution deposited from the novel cluster solution via the spin-coating method on Si (100) and quartz substrates. The films were annealed at increasing temperatures up to 800 °C, and characterization of these films via TEM and XRD confirms binary CoO crystalline phase present in an amorphous AlO network.

Amorphous Mixed-Metal Oxide Thin Films from Aqueous Solution Precursors with Near-Atomic Smoothness.

Thin films with tunable and homogeneous composition are required for many applications. We report the synthesis and characterization of a new class of compositionally homogeneous thin films that are amorphous solid solutions of AlO and transition metal oxides (TMO) including VO, CrO, MnO, FeO, CoO, NiO, CuO, and ZnO. The synthesis is enabled by the rapid decomposition of molecular transition-metal nitrates TM(NO) at low temperature along with precondensed oligomeric Al(OH)(NO) cluster species, both of which can be processed from aq solution.