We report a detailed study of low-temperature (mK) transport properties of a silicon double-dot system fabricated by phosphorous ion implantation. The device under study consists of two phosphorous nanoscale islands doped to above the metal-insulator transition, separated from each other and the source and drain reservoirs by nominally undoped (intrinsic) silicon tunnel barriers. Metallic control gates, together with an Al-AlO(x) single-electron transistor (SET), were positioned on the substrate surface, capacitively coupled to the buried dots.
View Article and Find Full Text PDFWe demonstrate the use of etched registration markers for the alignment of four-terminal ex situ macroscopic contacts created by conventional optical lithography to buried nanoscale Si:P devices, patterned by hydrogen-based scanning tunnelling microscope (STM) lithography. Using SiO(2) as a mask we are able to protect the silicon surface from contamination during marker fabrication and can achieve atomically flat surfaces with atomic-resolution imaging. The registration markers are shown to withstand substrate heating to approximately 1200 degrees C and epitaxial overgrowth of approximately 25 nm Si.
View Article and Find Full Text PDFWe review progress at the Australian Centre for Quantum Computer Technology towards the fabrication and demonstration of spin qubits and charge qubits based on phosphorus donor atoms embedded in intrinsic silicon. Fabrication is being pursued via two complementary pathways: a 'top-down' approach for near-term production of few-qubit demonstration devices and a 'bottom-up' approach for large-scale qubit arrays with sub-nanometre precision. The 'top-down' approach employs a low-energy (keV) ion beam to implant the phosphorus atoms.
View Article and Find Full Text PDFPhys Rev B Condens Matter
August 1995