Publications by authors named "E Gamet"

Article Synopsis
  • Gratings made with Laser Interference Lithography (LIL) show nonuniform periods, especially as substrate sizes increase.
  • A new noninvasive method using a concave vacuum chuck significantly improves period uniformity on 4-inch silicon wafers, reducing variation by 86% for a 1000 nm central grating period.
  • The study includes experimental results showing the effectiveness of the concave chuck, comparisons between different LIL setups, and verification of wafer flatness through optical profilometry.
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Zirconium oxide (ZrO) is a well-studied and promising material due to its remarkable chemical and physical properties. It is used, for example, in coatings for corrosion protection layer, wear and oxidation, in optical applications (mirror, filters), for decorative components, for anti-counterfeiting solutions and for medical applications. ZrO can be obtained as a thin film using different deposition methods such as physical vapor deposition (PVD) or chemical vapor deposition (CVD).

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This paper is aimed at investigating the process of photocrosslinking under Deep-UV irradiation of nanocomposite thin films doped with cobalt ferrite magnetic nanoparticles (MNPs). This material is composed of a hybrid sol-gel matrix in which MNP can be introduced with high concentrations up to 20 vol%. Deep-UV (193 nm) is not only interesting for high-resolution patterning but we also show an efficient photopolymerization pathway even in the presence of high concentration of MNPs.

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A significant enhancement of the longitudinal magneto-optical effect is demonstrated numerically and experimentally in transmission, and for small angles of incidence, through a subwavelength resonant structure consisting of a dielectric grating on top of a magneto-optical waveguide. The enhanced polarization rotation is associated with a high transmittance. These low footprint devices may thus be suitable for applications like magnetic field sensors or in non-destructive testing.

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We report on the design, fabrication, and characterization of an all-dielectric one-dimensional (1D) resonant device formed by a silicon nitride grating impregnated by a low-index magneto-optical silica-type matrix. This impregnation is realized through the dipping of the 966 nm periodic template in a sol-gel solution previously doped with CoFeO nanoparticles, and able to fill the grating slits. By a proper adjustment of the geometrical parameters of such a photonic crystal membrane, simultaneous excitation of transverse electric (TE) and transverse magnetic (TM) polarization resonances is nearly achieved at 1570 nm.

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