Investigation on Temperature Dependent Inductance (TDI) of a planar Multi-Layer Inductor (MLI) down to 4.2 K.

This paper presents an investigation of the temperature dependence characteristics specific to cryogenic planar Multi-Layer Inductors (MLIs). This paper establishes that the inductance of a planar MLI at a specific frequency varies with temperature when the sensor is cooled down to 4.2 K while providing a detailed analysis of various possible factors that might contribute to the variation in the sensor performance, such as the thermal deformation and the variation in the properties of sensor materials, using a combination of experiments and simulations.