Enhancing SiN Selectivity over SiO in Low-RF Power NF-O Reactive Ion Etching: The Effect of NO Surface Reaction.

Highly selective etching of silicon nitride (SiN) and silicon dioxide (SiO) has received considerable attention from the semiconductor community owing to its precise patterning and cost efficiency. We investigated the etching selectivity of SiN and SiO in an NF/O radio-frequency glow discharge. The etch rate linearly depended on the source and bias powers, whereas the etch selectivity was affected by the power and ratio of the gas mixture.

Preparations and Thermal Properties of PDMS-AlN-AlO Composites through the Incorporation of Poly(Catechol-Amine)-Modified Boron Nitride Nanotubes.

As one of the emerging nanomaterials, boron nitride nanotubes (BNNTs) provide promising opportunities for diverse applications due to their unique properties, such as high thermal conductivity, immense inertness, and high-temperature durability, while the instability of BNNTs due to their high surface induces agglomerates susceptible to the loss of their advantages. Therefore, the proper functionalization of BNNTs is crucial to highlight their fundamental characteristics. Herein, a simplistic low-cost approach of BNNT surface modification through catechol-polyamine (CAPA) interfacial polymerization is postulated to improve its dispersibility on the polymeric matrix.

A novel energy efficient path for nitrogen fixation using a non-thermal arc.

Plasma-assisted nitrogen fixation is a promising sustainable and clean alternative to the classical Haber-Bosch process. However, the high energy consumption and low production rate of plasma-assisted nitrogen fixation limit its application. This study shows that the non-thermal (non-equilibrium) enhancement of the arc plasma significantly reduces the energy consumption of nitrogen fixation.

Removal of ethyl acetate in air by using different types of corona discharges generated in a honeycomb monolith structure coated with Pd/γ-alumina.

A method based on the corona discharge produced by high voltage alternating current (AC) and direct current (DC) over a Pd/γ-AlO catalyst supported on a honeycomb structure monolith was developed to eliminate ethyl acetate (EA) from the air at atmospheric pressure. The characteristics of the AC and DC corona discharge generated inside the honeycomb structure monolith were investigated by varying the humidity, gas hourly space velocity (GHSV), and temperature. The results showed that the DC corona discharge is more stable and easily operated at different operating conditions such as humidity, GHSV, and gas temperature compared to the AC discharge.

Efficient methane-to-acetylene conversion using low-current arcs.

The proliferation of natural gas production had led to increased utilization of methane as a raw material for chemicals. The most significant bottleneck in this process is the high activation energy of methane. This paper reports the direct conversion of methane to acetylene in a novel rotating arc driven by AC electrical power.