Theoretical study of extremely narrow plasmonic surface lattice resonances observed by MIM nanogratings under normal incidence in asymmetric environments.

Nanoarray structures can support plasmonic surface lattice resonances (SLRs) with extremely narrow linewidths and huge electric field enhancement features, which are attractive applications in nanolasers, biochemical sensors, and nonlinear optics. However, current nanoarray structures located in an asymmetric dielectric environment with a refractive index contrast of 1.00/1.

Digital Tri-Axis Accelerometer with X/Y-Axial Resonators and Z-Axial Capacitive Seesaw.

A tri-axis accelerometer with a digital readout circuit and communication system is introduced. It is composed of two resonant accelerometers in the x and y-axis, and a seesaw capacitive one in the z-axis. The device is encapsulated in air to ensure that the z-axis works in an over-damped state.

Optimization and Fabrication of an MOEMS Gyroscope Based on a WGM Resonator.

In this paper, the characterization of a whispering gallery mode (WGM) resonator applied in a novel micro-opto-electro-mechanical system (MOEMS) gyroscope was investigated. The WGM optical transmission coupling model was analyzed and compared by adjusting key parameters, such as the cavity radius, the waveguide width, and the gap between them for silicon and silicon nitride materials in simulations, which will greatly affect the quality factor (Q) of the WGM resonator. Furthermore, the structural parameters of the disk resonant gyroscope were also optimized.

A New Design of an MOEMS Gyroscope Based on a WGM Microdisk Resonator.

In this paper, we present a new design for a micro-opto-electro-mechanical (MOEMS) gyroscope based on a whispering-gallery mode (WGM) microdisk resonator and MEMS resonator. The mechanical characteristics, frequency split, and quality factor (Q) of the MEMS resonator; the optical characteristics, Q value, and coupling regimes of the WGM resonator; and the coupling between the two resonators were analyzed. Its operation principle-the transformation process from angular velocity to the resonance wavelength of the WGM resonator-is presented at same time.

Correction: Shen, X. et al. Research on the Disc Sensitive Structure of a Micro Optoelectromechanical System (MOEMS) Resonator Gyroscope. , 2019, , 264.

In the published paper [...

Research on the Disc Sensitive Structure of a Micro Optoelectromechanical System (MOEMS) Resonator Gyroscope.

A micro optoelectromechanical system (MOEMS) resonator gyroscope based on a waveguide micro-ring resonator was proposed. This sensor was operated by measuring the shift of the transmission spectrum. Modal analysis was carried out for the disc sensitive structure of the MOEMS resonator gyroscope (MOEMS-RG).

Coupling Mechanism Analysis and Fabrication of Triaxial Gyroscopes in Monolithic MIMU.

A novel fully decoupled micro inertial measurement unit (MIMU) is presented in this paper. The proposed MIMU structure, mostly focusing on the gyroscope unit, is highly symmetrical and can be limited to an area of 10,000 μm × 10,000 μm. Both the tri-axis gyroscope and tri-axis accelerometer structures are fabricated on the same single silicon chip, which can differentially detect three axes' angular velocities and linear accelerated velocities at the same time.

Structural Analysis of Disk Resonance Gyroscope.

In this paper, we present two design methods to improve the performance of disk resonator gyroscope (DRG), including decreasing the frequency split and increasing the quality factor (Q). The structure parameters, which can affect the frequency split and Q value were concluded with the help of the FEM software. Meanwhile, devices with different parameters were designed, fabricated, and tested, and the experimental result was in accordance with the simulation.

A Robust Inner and Outer Loop Control Method for Trajectory Tracking of a Quadrotor.

In order to achieve the complicated trajectory tracking of quadrotor, a geometric inner and outer loop control scheme is presented. The outer loop generates the desired rotation matrix for the inner loop. To improve the response speed and robustness, a geometric SMC controller is designed for the inner loop.

Indoor Autonomous Control of a Two-Wheeled Inverted Pendulum Vehicle Using Ultra Wide Band Technology.

In this paper, we aimed to achieve the indoor tracking control of a two-wheeled inverted pendulum (TWIP) vehicle. The attitude data are acquired from a low cost micro inertial measurement unit (IMU), and the ultra-wideband (UWB) technology is utilized to obtain an accurate estimation of the TWIP's position. We propose a dual-loop control method to realize the simultaneous balance and trajectory tracking control for the TWIP vehicle.

A Digitalized Gyroscope System Based on a Modified Adaptive Control Method.

In this work we investigate the possibility of applying the adaptive control algorithm to Micro-Electro-Mechanical System (MEMS) gyroscopes. Through comparing the gyroscope working conditions with the reference model, the adaptive control method can provide online estimation of the key parameters and the proper control strategy for the system. The digital second-order oscillators in the reference model are substituted for two phase locked loops (PLLs) to achieve a more steady amplitude and frequency control.

A Mode Matched Triaxial Vibratory Wheel Gyroscope with Fully Decoupled Structure.

To avoid the oscillation of four unequal masses seen in previous triaxial linear gyroscopes, a modified silicon triaxial gyroscope with a rotary wheel is presented in this paper. To maintain a large sensitivity and suppress the coupling of different modes, this novel gyroscope structure is designed be perfectly symmetrical with a relatively large size of about 9.8 mm × 9.

Design and Analysis of a Novel Fully Decoupled Tri-axis Linear Vibratory Gyroscope with Matched Modes.

We present in this paper a novel fully decoupled silicon micromachined tri-axis linear vibratory gyroscope. The proposed gyroscope structure is highly symmetrical and can be limited to an area of about 8.5 mm × 8.

The development of micromachined gyroscope structure and circuitry technology.

This review surveys micromachined gyroscope structure and circuitry technology. The principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS gyroscope structures, materials and fabrication technologies are illustrated.

A micro dynamically tuned gyroscope with adjustable static capacitance.

This paper presents a novel micro dynamically tuned gyroscope (MDTG) with adjustable static capacitance. First, the principle of MDTG is theoretically analyzed. Next, some simulations under the optimized structure parameters are given as a reference for the mask design of the rotor wafer and electrode plates.

A digitalized silicon microgyroscope based on embedded FPGA.

This paper presents a novel digital miniaturization method for a prototype silicon micro-gyroscope (SMG) with the symmetrical and decoupled structure. The schematic blocks of the overall system consist of high precision analog front-end interface, high-speed 18-bit analog to digital convertor, a high-performance core Field Programmable Gate Array (FPGA) chip and other peripherals such as high-speed serial ports for transmitting data. In drive mode, the closed-loop drive circuit are implemented by automatic gain control (AGC) loop and software phase-locked loop (SPLL) based on the Coordinated Rotation Digital Computer (CORDIC) algorithm.

Development of a prototype miniature silicon microgyroscope.

A miniature vacuum-packaged silicon microgyroscope (SMG) with symmetrical and decoupled structure was designed to prevent unintended coupling between drive and sense modes. To ensure high resonant stability and strong disturbance resisting capacity, a self-oscillating closed-loop circuit including an automatic gain control (AGC) loop based on electrostatic force feedback is adopted in drive mode, while, dual-channel decomposition and reconstruction closed loops are applied in sense mode. Moreover, the temperature effect on its zero bias was characterized experimentally and a practical compensation method is given.

Temperature effects and compensation-control methods.

In the analysis of the effects of temperature on the performance of microgyroscopes, it is found that the resonant frequency of the microgyroscope decreases linearly as the temperature increases, and the quality factor changes drastically at low temperatures. Moreover, the zero bias changes greatly with temperature variations. To reduce the temperature effects on the microgyroscope, temperature compensation-control methods are proposed.