ACS Appl Mater Interfaces
July 2024
Although laminate structures are widely used in electrostatic capacitors, unavoidable heterogeneous interfaces often deteriorate the dielectric properties by impeding film crystallization. In this study, a TiO/ZrO/TiO (TZT) laminate structure, where upper-TiO deposited on the heterogeneous interface was crystallized by plasma-assisted atomic layer annealing (ALA), was investigated. ALA effectively induced the phase transition of the upper-TiO from the amorphous or anatase phase to the rutile phase, leading to an increase in the dielectric constant, whereas the ZrO blocking interlayer maintained the amorphous phase owing to the extremely localized effect of ALA.
View Article and Find Full Text PDFOptical methods for measuring of the emission spectra of oscillator circuits operating in the 400-600 GHz range are described. The emitted power from patch antennas included in the circuits is measured by placing the circuit in the source chamber of a Fourier-transform interferometric spectrometer. The results show that this optical technique is useful for measuring circuits pushing the frontier in operating frequency.
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