A Sprayed Graphene Pattern-Based Flexible Strain Sensor with High Sensitivity and Fast Response.

Flexible strain sensors have a wide range of applications in biomedical science, aerospace industry, portable devices, precise manufacturing, etc. However, the manufacturing processes of most flexible strain sensors previously reported have usually required high manufacturing costs and harsh experimental conditions. Besides, research interests are often focused on improving a single attribute parameter while ignoring others.

High Dynamic Micro Vibrator with Integrated Optical Displacement Detector for In-Situ Self-Calibration of MEMS Inertial Sensors.

The scale factor drifts and other long-term instability drifts of Micro-Electro-Mechanical System (MEMS) inertial sensors are the main contributors of the position and orientation errors in high dynamic environments. In this paper, a novel high dynamic micro vibrator, which could provide high acceleration and high angular rate rotation with integrated optical displacement detector, is proposed. Commercial MEMS inertial sensors, including 3-axis accelerometer and 6-axis inertial measurement unit which is about 3 mm * 3 mm * 1 mm with 19 mg, could be bonded on the vibration platform of the micro vibrator to perform in-situ during the self-calibration procedure.

Effects of Sputtering Parameters on AlN Film Growth on Flexible Hastelloy Tapes by Two-Step Deposition Technique.

AlN thin films were deposited on flexible Hastelloy tapes and Si (100) substrate by middle-frequency magnetron sputtering. A layer of Y₂O₃ films was used as a buffer layer for the Hastelloy tapes. A two-step deposition technique was used to prepare the AlN films.

Effects of AlN Coating Layer on High Temperature Characteristics of Langasite SAW Sensors.

High temperature characteristics of langasite surface acoustic wave (SAW) devices coated with an AlN thin film have been investigated in this work. The AlN films were deposited on the prepared SAW devices by mid-frequency magnetron sputtering. The SAW devices coated with AlN films were measured from room temperature to 600 °C.

The Characterization of Surface Acoustic Wave Devices Based on AlN-Metal Structures.

We report in this paper on the study of surface acoustic wave (SAW) resonators based on an AlN/titanium alloy (TC4) structure. The AlN/TC4 structure with different thicknesses of AlN films was simulated, and the acoustic propagating modes were discussed. Based on the simulation results, interdigital transducers with a periodic length of 24 μm were patterned by lift-off photolithography techniques on the AlN films/TC4 structure, while the AlN film thickness was in the range 1.