Predictive Maintenance of Pins in the ECD Equipment for Cu Deposition in the Semiconductor Industry.

Nowadays, Predictive Maintenance is a mandatory tool to reduce the cost of production in the semiconductor industry. This paper considers as a case study a critical part of the electrochemical deposition system, namely, the four Pins that hold a wafer inside a chamber. The aim of the study is to replace the schedule of replacement of Pins presently based on fixed timing (Preventive Maintenance) with a Hardware/Software system that monitors the conditions of the Pins and signals possible conditions of failure (Predictive Maintenance).

Evaluation of supervised methods for the classification of major tissues and subcortical structures in multispectral brain magnetic resonance images.

This work investigates the capability of supervised classification methods in detecting both major tissues and subcortical structures using multispectral brain magnetic resonance images. First, by means of a realistic digital brain phantom, we investigated the classification performance of various Discriminant Analysis methods, K-Nearest Neighbor and Support Vector Machine. Then, using phantom and real data, we quantitatively assessed the benefits of integrating anatomical information in the classification, in the form of voxels coordinates as additional features to the intensities or tissue probabilistic atlases as priors.