Scalable and Transfer-Free Fabrication of MoS/SiO Hybrid Nanophotonic Cavity Arrays with Quality Factors Exceeding 4000.

We report the fully-scalable fabrication of a large array of hybrid molybdenum disulfide (MoS) - silicon dioxide (SiO) one-dimensional, free-standing photonic-crystal cavities capable of enhancement of the MoS photoluminescence at the narrow cavity resonance. We demonstrate continuous tunability of the cavity resonance wavelength across the entire emission band of MoS simply by variation of the photonic crystal periodicity. Device fabrication started by substrate-scale growth of MoS using chemical vapor deposition (CVD) on non-birefringent thermal oxide on a silicon wafer; it was followed by lithographic fabrication of a photonic crystal nanocavity array on the same substrate at more than 50% yield of functional devices.