Fabrication and Electrical Characterization of Low-Temperature Polysilicon Films for Sensor Applications.

The development of low-temperature piezoresistive materials provides compatibility with standard silicon-based MEMS fabrication processes. Additionally, it enables the use of such material in flexible substrates, thereby expanding the potential for various device applications. This work demonstrates, for the first time, the fabrication of a 200 nm polycrystalline silicon thin film through a metal-induced crystallization process mediated by an AlSiCu alloy at temperatures as low as 450 °C on top of silicon and polyimide (PI) substrates.

Design of Arbitrary Magnetic Patterns on Magnetic Polymer Composite Objects: A Finite Element Modelling Tool.

Magnetic sensor systems integrate a sensing element and magnetic field generators to determine their relative position or to measure movement. Typically, the magnetic fields are produced by permanent magnets, which have high intensity but are hard to machine into custom shapes. However, novel solutions using magnetic polymer composites (MPCs) have emerged as field generators due to their low cost, weight and patterning freedom.