Pressure broadening of H(2)O absorption lines in the 1.3 microm region measured by continuous wave-cavity ring-down spectroscopy: application in the trace detection of water vapor in N(2), SiH(4), CF(4), and PH(3).

A continuous wave cavity ring-down (cw-CRD) spectrometer has been developed for the measurement of trace levels of water vapor by absorption spectroscopy at wavelengths in the vicinity of 1358 nm and 1392 nm. The speed of data acquisition and selectivity make cavity ringdown spectroscopy potentially more useful than current techniques for measurement of trace water in process gases and vacuum environments used for semiconductor manufacture where water vapor contamination has a detrimental effect on the final product. The pressure broadening coefficients (gamma) for bath gases N(2), air, and Ar and semiconductor process gases SiH(4), PH(3), and CF(4) were determined for a range of absorption lines in the 2nu(1) and nu(1) + nu(3) bands of H(2)O.