Use of optical spacers to enhance infrared Mueller ellipsometry sensitivity: application to the characterization of organic thin films.

Mueller ellipsometry in the mid-infrared (IR) spectral range can be used to obtain information about chemical composition through the vibrational spectra of samples. In the case of very thin films (<100  nm), the ellipsometric spectral features due to vibrational absorption are in general quite weak, and sometimes they are hidden by the noise in the measured data. In this work, we present one method based on the use of optical spacers as a tool to enhance the sensitivity of IR Mueller ellipsometry.

Spectroscopic ellipsometry and polarimetry for materials and systems analysis at the nanometer scale: state-of-the-art, potential, and perspectives.

This paper discusses the fundamentals, applications, potential, limitations, and future perspectives of polarized light reflection techniques for the characterization of materials and related systems and devices at the nanoscale. These techniques include spectroscopic ellipsometry, polarimetry, and reflectance anisotropy. We give an overview of the various ellipsometry strategies for the measurement and analysis of nanometric films, metal nanoparticles and nanowires, semiconductor nanocrystals, and submicron periodic structures.