Direct-Write Laser Greyscale Lithography for Multi-Layer Lead Zirconate Titanate Thin Films.

Direct-write laser greyscale lithography has been used to facilitate a single step patterning technique for multi-layer lead zirconate titanate (PZT) thin films. A 2.55 μm thick photoresist was patterned with a direct-write laser.

Direct-Write Laser Grayscale Lithography for Multilayer Lead Zirconate Titanate Thin Films.

Direct-write laser grayscale lithography has been used to facilitate a single-step patterning technique for multilayer lead zirconate titanate (PZT) thin films. A 2.55- -thick photoresist was patterned with a direct-write laser.