Planar Microsupercapacitors Based on Oblique Angle Deposited Highly Porous TiN Thin Films.

Microsupercapacitors are gaining increasing interest for energy storage in miniaturized electronic devices. However, the production of porous electrode material with standard microfabrication techniques is a big problem. Here, we report on the oblique angle deposition of highly porous and nanostructured columnar titanium nitride (TiN) films on silicon substrate using magnetron sputtering for high-performance microsupercapacitors.

Influence of the thickness of an antiferromagnetic IrMn layer on the static and dynamic magnetization of weakly coupled CoFeB/IrMn/CoFeB trilayers.

The static and dynamic magnetization response of the CoFeB/IrMn/CoFeB trilayer system with varying thickness of the antiferromagnetic (AF) IrMn layer is investigated using magnetization hysteresis (-) and ferromagnetic resonance (FMR) measurements. The study shows that the two CoFeB layers are coupled via a long-range dynamic exchange effect through the IrMn layer up to a thickness of 6 nm. It is found that with the increase in IrMn layer thickness a nearly linear enhancement of the effective magnetic damping constant occurs, which is associated with the simultaneous influence of spin pumping and interlayer exchange coupling effects.