Dual band sensitivity enhancements of a VO(x) microbolometer array using a patterned gold black absorber.

Infrared-absorbing gold black has been selectively patterned onto the active surfaces of a vanadium-oxide-based infrared bolometer array. Patterning by metal lift-off relies on protection of the fragile gold black with an evaporated oxide, which preserves much of gold black's high absorptance. This patterned gold black also survives the dry-etch removal of the sacrificial polyimide used to fabricate the air-bridge bolometers.

Far-infrared absorber based on standing-wave resonances in metal-dielectric-metal cavity.

Thin-film resonant absorbers for the far-IR spectral range were fabricated, characterized, and modeled. The 3-μm-thick structure comprises a periodic surface array of metal squares, a dielectric spacer and a metallic ground plane. Up to 95% absorption for the fundamental band at ~53.