A MEMS grating modulator with a tunable sinusoidal grating for large-scale extendable apertures.

Microelectromechanical system (MEMS) grating modulators enable versatile beam steering functions through the electrostatic actuation of movable ribbons. These modulators operate at ultrahigh frequencies in the hundred kHz range, and their micromirror-free configuration simplifies the fabrication process and reduces costs compared to micromirror-based modulators. However, these modulators are limited in their optical efficiency and aperture.