Fast semiconductor radiation detectors operated in current mode provide a valuable diagnostic in pulsed power applications. Si detectors are common due to the availability of high-quality materials and mature fabrication processes, but they offer low absorption for hard x-rays above ∼10 keV. GaAs can provide increased hard x-ray absorption for the same detector volume due to a higher atomic number.
View Article and Find Full Text PDFIn this paper, we analyze a compact silicon photonic phase modulator at 1.55 μm using epsilon-near-zero transparent conducting oxide (TCO) films. The operating principle of the non-resonant phase modulator is field-effect carrier density modulation in a thin TCO film deposited on top of a passive silicon waveguide with a CMOS-compatible fabrication process.
View Article and Find Full Text PDFA micromachined accelerometer device structure with diffraction-based optical detection and integrated electrostatic actuation is introduced. The sensor consists of a bulk silicon proof mass electrode that moves vertically with respect to a rigid diffraction grating backplate electrode to provide interferometric detection resolution of the proof-mass displacement when illuminated with coherent light. The sensor architecture includes a monolithically integrated electrostatic actuation port that enables the application of precisely controlled broadband forces to the proof mass while the displacement is simultaneously and independently measured optically.
View Article and Find Full Text PDF