A 3D LTCC-Based Ceramic Microfluidic System with RF Dielectric Heating of Liquids.

The design, fabrication and functional evaluation of the radio-frequency dielectric heating of liquids in an LTCC-based ceramic microfluidic system are described and discussed. The device, which relies on the dielectric heating of liquids, was fabricated using a low temperature co-fired ceramic (LTCC) technology. A multilayered ceramic structure with integrated electrodes, buried channels and cavities in micro and millimetre scales was fabricated.

Construction and Functionality of a Ceramic Resonant Pressure Sensor for Operation at Elevated Temperatures.

Piezoelectric ceramic resonant pressure sensors have shown potential as sensing elements for harsh environments, such as elevated temperatures. For operating temperatures exceeding ~250 °C, conventional and widely used Pb(Zr,Ti)O₃ (PZT) piezoelectrics should be replaced. Here, a ceramic pressure sensor from low-temperature co-fired ceramics (LTCC) was constructed by integrating a piezoelectric actuator made from bismuth ferrite (BiFeO₃) on a diaphragm.

The Impact of Housing on the Characteristics of Ceramic Pressure Sensors--An Issue of Design for Manufacturability.

An exploratory study of the impact of housing on the characteristics of a low-temperature co-fired ceramic (LTCC) pressure sensor is presented. The ceramic sensor structure is sealed in a plastic housing. This may have non-negligible effect on the final characteristics and should be considered in the early design phase.

Ceramic MEMS designed for wireless pressure monitoring in the industrial environment.

This paper presents the design of a wireless pressure-monitoring system for harsh-environment applications. Two types of ceramic pressure sensors made with a low-temperature cofired ceramic (LTCC) were considered. The first type is a piezoresistive strain gauge pressure sensor.