The paper considers the possibility of using the diamond-silicon carbide composite Skeleton with a technological coating of polycrystalline silicon as a substrate for X-ray mirrors used with powerful synchrotron radiation sources (third+ and fourth generation). Samples were studied after polishing to provide the following surface parameters: root-mean-square flatness ≃ 50 nm, micro-roughness on the frame 2 µm × 2 µm σ ≃ 0.15 nm.
View Article and Find Full Text PDFThis study proposes a method for interferometric fiber optic sensor readouts. The method utilizes the advantages of the active homodyne demodulation technique and low-coherence interferometry. The usage of the tandem low-coherence interferometer enables modulating the reference interferometer without any changes to the sensor.
View Article and Find Full Text PDFThis study proposes a method for detecting small-length fluctuations for fiber-optic sensors (FOS). The method is based on a tracking tandem low-coherence interferometer and enables the ability to compensate for temperature and deformation drifts in FOS. As a result, the constant high sensitivity of FOS over a wide frequency range is guaranteed.
View Article and Find Full Text PDFThe paper proposes a technology based on UV-LIGA process for microoptoelectromechanical systems (MOEMS) manufacturing. We used the original combination of materials and technological steps, in which any of the materials does not enter chemical reactions with each other, while all of them are weakly sensitive to the effects of oxygen plasma. This made it suitable for long-term etching in the oxygen plasma at low discharge power with the complete preservation of the original geometry, including small parts.
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