Micromachines (Basel)
January 2025
A wafer-scale process for fabricating monolithically suspended nano-perforated membranes (NPMs) with integrated support structures into silicon is developed. Existing fabrication methods are suitable for many desired geometries, but face challenges related to mechanical robustness and fabrication complexity. We demonstrate a process that utilizes the cyclic deposit, remove, etch, and multi-step (DREM) process for directional etching of high-aspect-ratio (HAR) 300 nm in diameter nano-pores of 700 nm pitch.
View Article and Find Full Text PDFOxide-derived copper (OD-Cu) electrodes exhibit unprecedented CO reduction performance towards liquid fuels, producing ethanol and acetate with >50% Faradaic efficiency at -0.3 V (vs. RHE).
View Article and Find Full Text PDFThis paper presents a novel apparatus for extracting volatile species from liquids using a "sniffer-chip." By ultrafast transfer of the volatile species through a perforated and hydrophobic membrane into an inert carrier gas stream, the sniffer-chip is able to transport the species directly to a mass spectrometer through a narrow capillary without the use of differential pumping. This method inherits features from differential electrochemical mass spectrometry (DEMS) and membrane inlet mass spectrometry (MIMS), but brings the best of both worlds, i.
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