Controlled Growth of Indium Oxide Nanowires for Gas Sensing Application.

Background: The InO nanowires have attracted enormous attention for gas sensor application due to their advantageous features. However, the controlled synthesis of InO nanowires for gas sensors is vital and challenging because the gas sensing performance of the nanowires is strongly dependent on their characteristics.

Methods: Here in this patent, we fabricated InO nanowires on SiO/Si substrate via a simple thermal vapor deposition method with the Au thin film as the catalyst.