Computer aided modeling of a new microwave plasma cavity with the H-type excitation at microwave frequency.

Computer modeling of the semi-lumped H field-generating multi helical coil, which can be used for generation of H-type discharges at microwave frequencies is presented in this paper. The aim of modeling was to support the design of model plasma source based upon a set of realistic dimensions, which should enable excitation of maximal values of H field at the axis of the discharge tube. As a result, a Microwave-Driven Inductively Coupled Plasma cavity (MICP) has been constructed and its assembly is presented in this paper.