Hybrid Deep Learning Crystallographic Mapping of Polymorphic Phases in Polycrystalline Hf Zr O Thin Films.

By controlling the configuration of polymorphic phases in high-k Hf Zr O thin films, new functionalities such as persistent ferroelectricity at an extremely small scale can be exploited. To bolster the technological progress and fundamental understanding of phase stabilization (or transition) and switching behavior in the research area, efficient and reliable mapping of the crystal symmetry encompassing the whole scale of thin films is an urgent requisite. Atomic-scale observation with electron microscopy can provide decisive information for discriminating structures with similar symmetries.