Observation of Nonlinear Standing Waves Excited by Plasma-Series-Resonance-Enhanced Harmonics in Capacitive Discharges.

We report the first experimental observation of nonlinear standing waves excited by plasma-series-resonance-enhanced harmonics in low pressure, very high frequency, parallel plate, capacitively coupled plasmas. Spatial structures of the harmonics of the magnetic field, measured by a magnetic probe, are in very good agreement with simulations based on a nonlinear electromagnetics model. At relatively low pressure, the nonlinear sheath motion generates high-order harmonics that can be strongly enhanced near the series resonance frequencies.

A new B-dot probe circuit for magnetic diagnostics of radio frequency discharges.

Accurate magnetic measurements in radio frequency capacitively coupled plasmas (CCP) are challenging due to the presence of inherently strong electric fields and relatively weak magnetic fields. In this work, a new B-dot probe circuit is presented, comprising two variable capacitors in a tunable series resonance circuit, with a center-tapped, step-up transformer. The output characteristics of the probe are predicted using two distinct equivalent circuit models, one for the differential mode and the other for the common mode.

Dynamic model of streamer coupling for the homogeneity of glowlike dielectric barrier discharges at near-atmospheric pressure.

A streamer coupling theory is developed to describe the formation of homogenous emission and the high propagation speed of emission patterns in near-atmospheric pressure discharges. By considering the effects of both electron diffusion and electronic drift in the streamer head, the minimum required preionization level n(min) for the formation of streamer coupling is found to be dependent on electric field strength, gas pressure, and electron temperature. The final stage of discharge is a microdischarge, when the preionization level n(0) is smaller than n(min).

Nanopantography: a new method for massively parallel nanopatterning over large areas.

We report a radically different approach to the versatile fabrication of nanometer-scale preselected patterns over large areas. Standard lithography, thin film deposition, and etching are used to fabricate arrays of ion-focusing microlenses (e.g.

Spatiotemporal dynamics of charged species in the afterglow of plasmas containing negative ions.

The spatiotemporal evolution of charged species densities and wall fluxes during the afterglow of an electronegative discharge has been investigated. The decay of a plasma with negative ions consists of two stages. During the first stage of the afterglow, electrons dominate plasma diffusion and negative ions are trapped inside the vessel by the static electric field; the flux of negative ions to the walls is nearly zero.

Negative ion density fronts during ignition and extinction of plasmas in electronegative gases.

Negative ion density fronts have been shown to occur in electronegative steady-state plasmas with hot electrons. In this Letter, we report theoretical and numerical results on the spatiotemporal evolution of negative ion density fronts during plasma ignition and extinction (afterglow). During plasma ignition, the negative ion fronts are analogous to hydrodynamic shocks.

Two-Dimensional Self-Consistent Radio Frequency Plasma Simulations Relevant to the Gaseous Electronics Conference RF Reference Cell.

Over the past few years multidimensional self-consistent plasma simulations including complex chemistry have been developed which are promising tools for furthering our understanding of reactive gas plasmas and for reactor design and optimization. These simulations must be benchmarked against experimental data obtained in well-characterized systems such as the Gaseous Electronics Conference (GEC) reference cell. Two-dimensional simulations relevant to the GEC Cell are reviewed in this paper with emphasis on fluid simulations.