Fabrication and characterization of a solid-state nanopore with self-aligned carbon nanoelectrodes for molecular detection.

Stochastic molecular sensors based on resistive pulse nanopore modalities are envisioned as facile DNA sequencers. However, recent advances in nanotechnology fabrication have highlighted promising alternative detection mechanisms with higher sensitivity and potential single-base resolution. In this paper we present the novel self-aligned fabrication of a solid-state nanopore device with integrated transverse graphene-like carbon nanoelectrodes for polyelectrolyte molecular detection.

Nanopore formation by low-energy focused electron beam machining.

The fabrication of nanopores in thin silicon nitride and aluminum oxide membranes by water vapor assisted, low-energy (0.2-20 kV) electron beam machining using a scanning electron microscope (SEM) is described. Using this technique, pores with diameters ranging in size from < 5 to 20 nm are easily formed.

Electron beam stimulated oxidation of carbon.

The patterning of carbon nanostructures by electron beam stimulated oxidation is described. Sputter deposited carbon thin films and carbon nanotubes are locally oxidized in a scanning electron microscope using injected water vapor. The resulting structures are examined with scanning electron microscopy and transmission electron microscopy.