Effect of Pd/ZnO Morphology on Surface Acoustic Wave Sensor Response.

Laser deposition was used to obtain Pd/ZnO bilayers, which were used as sensing layers in surface acoustic wave (SAW) sensors. The effect of laser deposition parameters such as deposition pressure, laser energy per pulse, laser wavelength or pulse duration on the porosity of the Pd and ZnO films used in the sensors was studied. The effect of the morphology of the Pd and ZnO components on the sensor response to hydrogen was assessed.