Fiber PROES: Phase resolved optical emission spectroscopy via optical fibers for knowledge-based plasma process development and monitoring.

High-frequency technological low-temperature plasmas play a key role in various industrial processes of high societal relevance, such as semiconductor manufacturing and gas conversion. Due to their complexity, the fundamentals of their operation are typically not understood and process development is done empirically. The continuous increase in process requirements with respect to precision and reproducibility, however, necessitates knowledge-based approaches toward process development and monitoring.