High precision structured H∞ control of a piezoelectric nanopositioning platform.

The inherent weakly damped resonant modes of the piezoelectric nanopositioning platform and the presence of model uncertainty seriously affect the performance of the system. A structured H∞ design is used in this paper to solve the accuracy and robustness problems respectively using a two-loop control structure. The multiple performance requirements of the system are constituted into an H∞ optimization matrix containing multi-dimensional performance diagonal decoupling outputs, and an inner damping controller d is set according to the damping of the resonant modes; the second-order robust feedback controller is preset in the inner loop to improve the robustness of the system; the tracking controller is connected in series in the outer loop to achieve high accuracy scanning; finally, the structured H∞ controller is designed to meet the multiple performance requirements.