Passivated Porous Silicon Membranes and Their Application to Optical Biosensing.

A robust fabrication method for stable mesoporous silicon membranes using standard microfabrication techniques is presented. The porous silicon membranes were passivated through the atomic layer deposition of different metal oxides, namely aluminium oxide AlO, hafnium oxide HfO and titanium oxide TiO. The fabricated membranes were characterized in terms of morphology, optical properties and chemical properties.