Acoustoelectric Effect due to an In-Depth Inhomogeneous Conductivity Change in ZnO/Fused Silica Substrates.

The acoustoelectric (AE) effect induced by the absorption of ultraviolet (UV) light at 365 nm in piezoelectric ZnO films was theoretically and experimentally studied. c-ZnO films 4.0 µm thick were grown by the RF reactive magnetron sputtering technique onto fused silica substrates at 200 °C.

Experimental and Theoretical Analysis of Rayleigh and Leaky-Sezawa Waves Propagating in ZnO/Fused Silica Substrates.

Piezoelectric c-axis oriented zinc oxide (ZnO) thin films, from 1.8 up to 6.6 µm thick, have been grown by the radio frequency magnetron sputtering technique onto fused silica substrates.

SAW Humidity Sensing with rr-P3HT Polymer Films.

In the present paper the humidity sensing properties of regioregular rr-P3HT (poly-3-hexylthiophene) polymer films is investigated by means of surface acoustic wave (SAW) based sensors implemented on LiNbO (128 Y-X) and ST-quartz piezoelectric substrates. The polymeric layers were deposited along the SAW propagation path by spray coating method and the layers thickness was measured by atomic force microscopy (AFM) technique. The response of the SAW devices to relative humidity (rh) changes in the range ~5-60% has been investigated by measuring the SAW phase and frequency changes induced by the (rh) absorption in the rr-P3HT layer.

UV Sensor Based on Surface Acoustic Waves in ZnO/Fused Silica.

Zinc oxide (ZnO) thin films have been grown by radio frequency sputtering technique on fused silica substrates. Optical and morphological characteristics of as-grown ZnO samples were measured by various techniques; an X-ray diffraction spectrum showed that the films exhibited hexagonal wurtzite structure and were c-axis-oriented normal to the substrate surface. Scanning electron microscopy images showed the dense columnar structure of the ZnO layers, and light absorption measurements allowed us to estimate the penetration depth of the optical radiation in the 200 to 480 nm wavelength range and the ZnO band-gap.

Acoustoelectric Effect of Rayleigh and Sezawa Waves in ZnO/Fused Silica Produced by an Inhomogeneous In-Depth Electrical Conductivity Profile.

The acousto-electric (AE) effect associated with the propagation of Rayleigh and Sezawa surface acoustic waves (SAWs) in ZnO/fused silica was theoretically investigated under the hypothesis that the electrical conductivity of the piezoelectric layer has an exponentially decaying profile akin to the photoconductivity effect induced by ultra-violet illumination in wide-band-gap photoconducting ZnO. The calculated waves' velocity and attenuation shift vs. ZnO conductivity curves have the form of a -relaxation response, as opposed to a -relaxation response which characterizes the AE effect due to surface conductivity changes.

Acoustoelectric Effect for Rayleigh Wave in ZnO Produced by an Inhomogeneous In-Depth Electrical Conductivity Profile.

The acousto-electric (AE) effect associated with the propagation of the Rayleigh wave in ZnO half-space was theoretically investigated by studying the changes in wave velocity and propagation loss induced by in-depth inhomogeneous changes in the ZnO electrical conductivity. An exponentially decaying profile for the electrical conductivity was attributed to the ZnO half-space, for some values of the exponential decay constant (from 100 to 500 nm), in order to simulate the photoconductivity effect induced by ultra-violet illumination. The calculated Rayleigh wave velocity and attenuation vs.

Experimental and Theoretical Study of Multifrequency Surface Acoustic Wave Devices in a Single Si/SiO/ZnO Piezoelectric Structure.

The propagation of surface acoustic waves (SAWs) along a ZnO/SiO/Si piezoelectric structure is experimentally and theoretically studied. Six surface acoustic modes were experimentally detected in the 134 to 570 MHz frequency range, for acoustic wavelength λ = 30 μm, and for SiO and ZnO layers with a thickness of 1 and 2.4 μm.

Amorphous SiC/c-ZnO-Based Quasi-Lamb Mode Sensor for Liquid Environments.

The propagation of the quasi-Lamb modes along a-SiC/ZnO thin composite plates was modeled and analysed with the aim to design a sensor able to detect the changes in parameters of a liquid environment, such as added mass and viscosity changes. The modes propagation was modeled by numerically solving the system of coupled electro-mechanical field equations in three media. The mode shape, the power flow, the phase velocity, and the electroacoustic coupling efficiency (K²) of the modes were calculated, specifically addressing the design of enhanced-coupling, microwave frequency sensors for applications in probing the solid/liquid interface.

A Theoretical Study of Love Wave Sensors Based on ZnO-Glass Layered Structures for Application to Liquid Environments.

The propagation of surface acoustic Love modes along ZnO/glass-based structures was modeled and analysed with the goal of designing a sensor able to detect changes in the environmental parameters, such as liquid viscosity changes and minute amounts of mass supported in the viscous liquid medium. Love mode propagation was modeled by numerically solving the system of coupled electro-mechanical field equations and Navier-Stokes equations. The phase and group velocities and the attenuation of the acoustic wave propagating along the 30° tilted c-axis ZnO/glass structure contacting a viscous non-conductive liquid were calculated for different ZnO guiding layer thicknesses, added mass thicknesses, and liquid viscosity and density.

Love-Mode MEMS Devices for Sensing Applications in Liquids.

Love-wave-based MEMS devices are theoretically investigated in their potential role as a promising technological platform for the development of acoustic-wave-based sensors for liquid environments. Both single- and bi-layered structures have been investigated and the velocity dispersion curves were calculated for different layer thicknesses, crystallographic orientations, material types and electrical boundary conditions. High velocity materials have been investigated too, enabling device miniaturization, power consumption reduction and integration with the conditioning electronic circuits.

Longitudinal modes along thin piezoelectric waveguides for liquid sensing applications.

The propagation of longitudinally polarized acoustic modes along thin piezoelectric plates (BN, ZnO, InN, AlN and GaN) is theoretically studied, aiming at the design of high frequency electroacoustic devices suitable for work in liquid environments. The investigation of the acoustic field profile across the plate revealed the presence of longitudinally polarized Lamb modes, travelling at velocities close to that of the longitudinal bulk acoustic wave propagating in the same direction. Such waves are suitable for the implementation of high-frequency, low-loss electroacoustic devices operating in liquid environments.

Analytical study of the propagation of fast longitudinal modes along wz-BN/AlN thin acoustic waveguides.

The propagation of the fundamental symmetric Lamb mode S0 along wz-BN/AlN thin composite plates suitable for telecommunication and sensing applications is studied. The investigation of the acoustic field profile across the plate thickness revealed the presence of modes having longitudinal polarization, the Anisimkin Jr. plate modes (AMs), travelling at a phase velocity close to that of the wz-BN longitudinal bulk acoustic wave propagating in the same direction.

Lamb waves propagation along 3C-SiC/AlN membranes for application in temperature-compensated, high-sensitivity gravimetric sensors.

The propagation of the fundamental quasi-symmetric Lamb mode S(0) travelling along 3C-SiC/c-AlN composite plates is theoretically studied with respect to the AlN and SiC film thickness, the acoustic wave propagation direction and the electrical boundary conditions. The temperature effects on the phase velocity have been considered for four AlN/SiC-based electroacoustic coupling configurations, specifically addressing the design of temperature-compensated, enhanced-coupling, GHz-range electroacoustic devices. The gravimetric sensitivity and resolution of the four temperature-stable SiC/AlN composite structures are theoretically investigated with respect to both the AlN and SiC sensing surface.