Capacitive pressure sensors based on microstructured polymer-derived SiCN ceramics for high-temperature applications.

Traditional silicon-based pressure sensors cannot meet demand of pressure information acquisition in high-temperature extreme environments due to their low sensitivity, limited detection temperature and complex processing. Herein, a capacitive pressure sensor is fabricated using polymer-derived SiCN ceramics with convex microstructures via a sample replication strategy. Its performance is measured at different pressures (0-800 kPa) from room temperature to 500 °C.