2D patch antenna array on a double metal quantum cascade laser with >90% coupling to a Gaussian beam and selectable facet transparency at 1.9 THz.

2×2 parallel fed and 3×3 serial fed patch antenna arrays on a benzocyclobutene (BCB) polymer layer are integrated with a 70 μm wide, dry etched, double metal waveguide quantum cascade laser, operating at about 1.9 THz. The BCB surrounds the quantum cascade laser ridge and is planarized to fit precisely its height.

High power and single mode quantum cascade lasers.

We present a single mode quantum cascade laser with nearly 1 W optical power. A buried distributed feedback reflector is used on the back section for wavelength selection. The laser is 6 mm long, 3.