Transparent electrochemical energy storage devices have attracted extensive attention for the power supply of next-generation transparent electronics. In this paper, semitransparent thin film batteries (TFBs) with a grid-structured design have been fabricated on glass substrates using specific photolithography and etching processes to achieve LiCoO/LiPON/Si structures below human eye resolution. UV-vis transmittances up to 60% have been measured for the obtained TFBs.
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