Thermal Behavior of Biaxial Piezoelectric MEMS-Scanners.

This paper presents the thermal behavior of non-resonant (quasi-static) piezoelectric biaxial MEMS scanners with Bragg reflectors. These scanners were developed for LIDAR (LIght Detection And Ranging) applications using a pulsed 1550 nm laser with an average power of 2 W. At this power, a standard metal (gold) reflector can overheat and be damaged.