Effects of temperature on columnar microstructure and recrystallization of TiO2 film produced by ion-assisted deposition.

Titanium oxide thin films were deposited by electron-beam evaporation with ion-beam-assisted deposition. The effect of the substrate temperature and annealing temperature on the columnar microstructure and recrystallization of titanium oxide was studied. The values of the refractive index varied from 2.