Strain visualization using large-angle convergent-beam electron diffraction.

In this study, we report a strain visualization method using large-angle convergent-beam electron diffraction (LACBED). We compare the proposed method with the strain maps acquired via STEM-NBD, a combination of scanning transmission electron microscopy (STEM) and nanobeam electron diffraction (NBD). Although STEM-NBD can precisely measure the lattice parameters, it requires a large amount of data and personal computer (PC) resources to obtain a two-dimensional strain map.