Effects of NH Plasma and Mg Doping on InGaZnO pH Sensing Membrane.

In this study, the effects of magnesium (Mg) doping and Ammonia (NH) plasma on the pH sensing capabilities of InGaZnO membranes were investigated. Undoped InGaZnO and Mg-doped pH sensing membranes with NH plasma were examined with multiple material analyses including X-ray diffraction, X-ray photoelectron spectroscopy, secondary ion mass spectroscopy and transmission electron microscope, and pH sensing behaviors of the membrane in electrolyte-insulator-semiconductors. Results indicate that Mg doping and NH plasma treatment could superpositionally enhance crystallization in fine nanostructures, and strengthen chemical bindings.

Comparison Between Performances of InO and InTiO-Based EIS Biosensors Using Post Plasma CF Treatment Applied in Glucose and Urea Sensing.

In this study, the effect of post-deposition tetrafluoromethane (CF) plasma treatment on the physical and electrical characteristics of an InTiO based electrolyte-insulator-semiconductor (EIS) sensor was investigated. Post-deposition CF plasma treatment typically improved the crystalline structure and repaired dangling bonds at the grain boundaries. We used the newly fabricated device to detect several ions, such as sodium and potassium, which are essential for many biological processes.