The dielectric properties, tunability and figure-of-merit () of relaxor PbLa(ZrTi)O (PLZT) films have been investigated. Dielectric measurements indicated that the dielectric constant (at zero-bias field), tunability and are enhanced as the film thickness increases, which are mainly attributed to the presence of an interfacial layer near the film-electrode interface. Experimental results illustrated that a slight reduction is observed in both dielectric constant and tunability (-2%) in a wide-frequency range (10 kHz-1 MHz); meanwhile, the value decreases significantly (-17%) with increasing frequency, arising from the higher dielectric loss value.
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