Characterization and inspection of microlens array by single cube beam splitter microscopy.

The application of a single cube beam splitter (SCBS) microscope to micro-optics characterization is presented. The SCBS in the optical path, with a small angle between the optical axis and its central semireflecting layer, not only gives off-axis digital holograms but also provides dual-channel imaging. It is a unique and easy way to perform uniformity inspection across the entire microlens array.

Microlens characterization by digital holographic microscopy with physical spherical phase compensation.

Microlenses have been characterized by a digital holographic microscopy system, which is immune to the inherent wavefront aberration. The digital holographic microscopy system takes advantage of fiber optics and uses the light emitted directly from a single-mode fiber as the recording reference wave. By using such a reference beam, which is quasi-identical to the object beam, the inherent wavefront aberration of the digital holographic microscope is removed.

Quasi-physical phase compensation in digital holographic microscopy.

In digital holographic microscopy, if an optical setup is well aligned, the phase curvature introduced by the microscope objective (MO) together with the illuminating wave to the object wave is a spherical phase curvature. It can be physically compensated by introducing the same spherical phase curvature in the reference beam. Digital holographic microscopy setups based on the Michelson interferometric configuration with MO and an adjustable lens are presented, which can well perform the quasi-physical phase compensation during the hologram recording.

Transmission digital holographic microscopy based on a beam-splitter cube interferometer.

A new optical configuration for digital holographic microscopy is presented. Digital off-axis holograms are recorded by use of a single cube beam splitter in a nonconventional configuration to both split and combine a diverging spherical wavefront as it emerges from a single point source. Both the amplitude and the phase can then be reconstructed, yielding intensity and phase images with improved resolution.

Digital holographic microscopy with physical phase compensation.

An optical configuration for digital holographic microscopy is presented. Digital off-axis holograms are recorded by using a single-cube beam splitter in a nonconventional configuration so as to both split and combine a diverging spherical wavefront emerging from a microscope objective. When a plane numerical reference wavefront is used for the reconstruction of the recorded digital hologram, the phase curvature introduced by the microscope objective together with the illuminating wave to the object wave can be physically compensated.