DNA Origami Adsorption and Lattice Formation on Different SiO Surfaces.

Self-assembled DNA origami lattices on silicon oxide surfaces have great potential to serve as masks in molecular lithography. However, silicon oxide surfaces come in many different forms and the type and history of the silicon oxide has a large effect on its physicochemical surface properties. Therefore, we here investigate DNA origami lattice formation on differently fabricated SiO films on silicon wafers after wet-chemical oxidation by RCA1.