Adaptive horizontal scaling method for speckle-assisted fringe projection profilometry.

Phase-shifting method is widely used in fringe projection profilometry to obtain high-precision wrapped phase maps. The wrapped phase map needs to be converted to an absolute phase map to recover 3D information. The speckle pattern based phase unwrapping method requires only one additional auxiliary pattern, showing great potential for fast 3D measurements.

Reconfigurable Angular Resolution Design Method in a Separate-Axis Lissajous Scanning MEMS LiDAR System.

MEMS-based LiDAR with a low cost and small volume is a promising solution for 3D measurement. In this paper, a reconfigurable angular resolution design method is proposed in a separate-axis Lissajous scanning MEMS LiDAR system. This design method reveals the influence factors on the angular resolution, including the characteristics of the MEMS mirrors, the laser duty cycle and pulse width, the processing time of the echo signal, the control precision of the MEMS mirror, and the laser divergence angle.

Fast Synchronization Method of Comb-Actuated MEMS Mirror Pair for LiDAR Application.

MEMS-based LiDAR (micro-electro-mechanical system based light detection and ranging), with a low cost and small volume, becomes a promising solution for the two-dimensional (2D) and three-dimensional (3D) optical imaging. A semi-coaxial MEMS LiDAR design, based on a synchronous MEMS mirror pair, was proposed in our early study. In this paper, we specifically reveal the synchronization method of the comb-actuated MEMS mirror pair, including the frequency, amplitude, and phase synchronization.

Curved light surface model for calibration of a structured light 3D modeling system based on striped patterns.

Structured light is an optical 3D surface measurement technique with the merits of high speed and high robustness. However, the huge size of traditional digital light processing (DLP) projectors limits its convenience in numerous applications. In this paper, a one-axis MEMS mirror is used as the structured light projector in 3D modeling systems, and has the advantages of small volume and low cost.

Three-Dimensional Simulation of DRIE Process Based on the Narrow Band Level Set and Monte Carlo Method.

A three-dimensional topography simulation of deep reactive ion etching (DRIE) is developed based on the narrow band level set method for surface evolution and Monte Carlo method for flux distribution. The advanced level set method is implemented to simulate the time-related movements of etched surface. In the meanwhile, accelerated by ray tracing algorithm, the Monte Carlo method incorporates all dominant physical and chemical mechanisms such as ion-enhanced etching, ballistic transport, ion scattering, and sidewall passivation.