An Investigation into High-Accuracy and Energy-Efficient Novel Capacitive MEMS for Tire Pressure Sensor Application.

Tire pressure monitoring systems (TPMSs) are essential for maintaining driving safety by continuously monitoring critical tire parameters, such as pressure and temperature, in real time during vehicle operation. Among these parameters, tire pressure is the most significant, necessitating the use of highly precise, cost-effective, and energy-efficient sensing technologies. With the rapid advancements in micro-electro-mechanical system (MEMS) technology, modern automotive sensing and monitoring systems increasingly rely on MEMS sensors due to their compact size, low cost, and low power consumption.

Performance-Enhanced Piezoelectric Micromachined Ultrasonic Transducers by PDMS Acoustic Lens Design.

This paper delves into enhancing the performance of ScAlN-based Piezoelectric Micromachined Ultrasonic Transducers (PMUTs) through the implementation of Polydimethylsiloxane (PDMS) acoustic lenses. The PMUT, encapsulated in PDMS, underwent thorough characterization through the utilization of an industry-standard hydrophone calibration instrument. The experimental results showed that the ScAlN-based PMUT with the PDMS lenses achieved an impressive sensitivity of -160 dB (re: 1 V/μPa), an improvement of more than 8 dB compared to the PMUT with an equivalent PDMS film.

A High-Resolution 3D Ultrasound Imaging System Oriented towards a Specific Application in Breast Cancer Detection Based on a 1 × 256 Ring Array.

This paper presents the design and development of a high-resolution 3D ultrasound imaging system based on a 1 × 256 piezoelectric ring array, achieving an accuracy of 0.1 mm in both ascending and descending modes. The system achieves an imaging spatial resolution of approximately 0.

Design and Fabrication of an Integrated Hollow Concave Cilium MEMS Cardiac Sound Sensor.

In light of a need for low-frequency, high sensitivity and broadband cardiac murmur signal detection, the present work puts forward an integrated MEMS-based heart sound sensor with a hollow concave ciliary micro-structure. The advantages of a hollow MEMS structure, in contrast to planar ciliated micro-structures, are that it reduces the ciliated mass and enhances the operating bandwidth. Meanwhile, the area of acoustic-wave reception is enlarged by the concave architecture, thereby enhancing the sensitivity at low frequencies.

Research on Broadband Matching Method for Capacitive Micromachined Ultrasonic Transducers Based on PDMS/TiO Particles.

The study of impedance matching between a transducer and its working medium is an important part of acoustic transducer design. The traditional quarter wavelength matching (Q-matching) scheme is not suitable for broadband capacitive micromachined ultrasonic transducers. To mitigate this issue, a 0-3 composite broadband matching layer based on polydimethylsiloxane (PDMS) substrate/TiO particles is designed to achieve electrical insulation and efficient acoustic energy transfer of underwater capacitive micromachined ultrasonic transducer (CMUT) devices.

Design and Realization of MEMS Heart Sound Sensor with Concave, Racket-Shaped Cilium.

The biomedical acoustic signal plays an important role in clinical non-invasive diagnosis. In view of the deficiencies in early diagnosis of cardiovascular diseases, acoustic properties of and heart sounds are utilized. In this paper, we propose an integrated concave cilium MEMS heart sound sensor.

Fabrication of 2-D Capacitive Micromachined Ultrasonic Transducer (CMUT) Array through Silicon Wafer Bonding.

Capacitive micromachined ultrasound transducers (CMUTs) have broad application prospects in medical imaging, flow monitoring, and nondestructive testing. CMUT arrays are limited by their fabrication process, which seriously restricts their further development and application. In this paper, a vacuum-sealed device for medical applications is introduced, which has the advantages of simple manufacturing process, no static friction, repeatability, and high reliability.

Research on Novel CMUTs for Detecting Micro-Pressure with Ultra-High Sensitivity and Linearity.

Capacitive micromachined ultrasonic transducers (CMUTs) have been indispensable owing to their resonance characteristics in the MHz frequency range. However, the inferior pressure sensitivity and linearity of traditional CMUTs themselves cannot meet the actual demands of micro-pressure measurements. In this paper, two novel CMUTs are proposed for the first time to improve the measuring performance of micro-pressure in the range of 0-10 kPa.

Batch Transfer Printing of Small-Size Silicon Nano-Films with Flat Stamp.

Silicon nano-film is essential for the rapidly developing fields of nanoscience and flexible electronics, due to its compatibility with the CMOS process. Viscoelastic PDMS material can adhere to Si, SiO, and other materials via intermolecular force and play a key role in flexible electronic devices. Researchers have studied many methods of transfer printing silicon nano-films based on PDMS stamps with pyramid microstructures.

Hybrid Cell Structure for Wideband CMUT: Design Method and Characteristic Analysis.

Capacitive micromachined ultrasonic transducer (CMUT) is an ultrasonic transducer based on the microelectromechanical system (MEMS). Wideband CMUT has good application prospects in ultrasonic imaging, ultrasonic identification, flow measurement, and nondestructive testing due to its excellent characteristics. This paper studies the method of increasing the bandwidth of the CMUT, proposes the structure of the wideband CMUT with a hybrid cell structure, and analyzes the design principles and characteristics of the wideband CMUT structure.

Wafer-Bonding Fabricated CMUT Device with Parylene Coating.

The advantages of the capacitive micromachined ultrasound transducer (CMUT) technology have provided revolutionary advances in ultrasound imaging. Extensive research on CMUT devices for high-frequency medical imaging applications has been conducted because of strong demands and fabrication realization by using standard silicon IC fabrication technology. However, CMUT devices for low-frequency underwater imaging applications have been rarely researched because it is difficult to fabricate thick membrane structures through depositing processes using standard IC fabrication technology due to stress-related problems.

Full-Differential Folded-Cascode Front-End Receiver Amplifier Integrated Circuit for Capacitive Micromachined Ultrasonic Transducers.

This paper describes the design of a front-end receiver amplifier for capacitive micromachined ultrasonic transducer (CMUT). The proposed operational amplifier (op amp) consists of a full differential folded-cascode amplifier stage followed by a class AB output stage. A feedback resistor is applied between the input and the output of the op amp to make a transimpedance amplifier.

A Mathematical Model of a Piezo-Resistive Eight-Beam Three-Axis Accelerometer with Simulation and Experimental Validation.

A mathematical model of a sensor is vital to deeply comprehend its working principle and implement its optimal design. However, mathematical models of piezo-resistive eight-beam three-axis accelerometers have rarely been reported. Furthermore, those works are largely focused on the analysis of sensing acceleration in the normal direction, rather than in three directions.

The Application of an Ultrasound Tomography Algorithm in a Novel Ring 3D Ultrasound Imaging System.

Currently, breast cancer is one of the most common cancers in women all over the world. A novel 3D breast ultrasound imaging ring system using the linear array transducer is proposed to decrease costs, reduce processing difficulties, and improve patient comfort as compared to modern day breast screening systems. The 1 × 128 Piezoelectric Micromachined Ultrasonic Transducer (PMUT) linear array is placed 90 degrees cross-vertically.

Underwater Imaging Using a 1 × 16 CMUT Linear Array.

A 1 × 16 capacitive micro-machined ultrasonic transducer linear array was designed, fabricated, and tested for underwater imaging in the low frequency range. The linear array was fabricated using Si-SOI bonding techniques. Underwater transmission performance was tested in a water tank, and the array has a resonant frequency of 700 kHz, with pressure amplitude 182 dB (μPa·m/V) at 1 m.

Capacitive Micromachined Ultrasonic Transducers (CMUTs) for Underwater Imaging Applications.

A capacitive micromachined ultrasonic transducer structure for use in underwater imaging is designed, fabricated and tested in this paper. In this structure, a silicon dioxide insulation layer is inserted between the top electrodes and the vibration membrane to prevent ohmic contact. The capacitance-voltage (C-V) characteristic curve shows that the transducer offers suitable levels of hysteresis and repeatability performance.