Graphene oxide decorated multi-frequency surface acoustic wave humidity sensor for hygienic applications.

This work presents the single-chip integration of a multi-frequency surface acoustic wave resonator (SAWR) based humidity sensor. Graphene oxide (GO), a humidity-sensing material, is integrated onto a confined sensing area of SAWR via electrospray deposition (ESD). The ESD method allows ng-resolution deposition of GO, optimizing the amount of sensing material.

A Study on the Effects of Bottom Electrode Designs on Aluminum Nitride Contour-Mode Resonators.

This study presents the effects of bottom electrode designs on the operation of laterally vibrating aluminum nitride (AlN) contour-mode resonators (CMRs). A total of 160 CMRs were analyzed with varying bottom electrode areas at two resonant frequencies () of about 230 MHz and 1.1 GHz.