Transmission Electron Microscopy and Electron Energy-Loss Spectroscopy Studies of Hole-Selective Molybdenum Oxide Contacts in Silicon Solar Cells.

In this study, substochiometric hole-selective molybdenum oxide (MoO) contacts in crystalline silicon (c-Si) solar cells were investigated by a combination of transmission electron microscopy (TEM) and spatially resolved electron energy-loss spectroscopy (SR-EELS). It was observed that ≈ 4 nm SiO interlayer grows at the MoO/c-Si interface during the evaporation of MoO over a c-Si substrate. SR-EELS analyses revealed the presence of a 1.