Lithographically Defined Cross-Linkable Top Coats for Nanomanufacturing with High-χ Block Copolymers.

The directed self-assembly (DSA) of block copolymers (BCPs) is a powerful method for the manufacture of high-resolution features. Critical issues remain to be addressed for successful implementation of DSA, such as dewetting and controlled orientation of BCP domains through physicochemical manipulations at the BCP interfaces, and the spatial positioning and registration of the BCP features. Here, we introduce novel top-coat (TC) materials designed to undergo cross-linking reactions triggered by thermal or photoactivation processes.

An embedded neutral layer for advanced surface affinity control in grapho-epitaxy directed self-assembly.

Advanced surface affinity control for grapho-epitaxy directed self-assembly (DSA) patterning is essential for providing reliable DSA-based solutions for the development of semiconductor patterning. Independent control of surface affinity between the bottom and the sidewalls of a topographical guiding structure was achieved by embedding an ultrathin layer in the guiding template stack. The implementation of an embedded layer with tunable surface properties for DSA grapho-epitaxy was evaluated and optimized on 300 mm wafers by critical dimension SEM characterization.

Assessing the Local Nanomechanical Properties of Self-Assembled Block Copolymer Thin Films by Peak Force Tapping.

The mechanical properties of several types of block copolymer (BCP) thin films have been investigated using PeakForce quantitative nanomechanical mapping. The samples consisted of polystyrene/poly(methylmethacrylate) (PS/PMMA)-based BCP thin films with different pitches both randomly oriented and self-assembled. The measured films have a critical thickness below 50 nm and present features to be resolved of less than 22 nm.

Optimization of the bulk heterojunction composition for enhanced photovoltaic properties: correlation between the molecular weight of the semiconducting polymer and device performance.

Herein we propose an approach toward the optimization of the photovoltaic performance of bulk heterojunctions by tuning the composition of the active layer with respect to the molecular weight of the semiconducting polymer. We used a poly(3-hexylthiophene):[6,6]-phenyl-C61-butyric acid methyl ester (P3HT:PCBM) blend as a typical system and varied the molecular weight of the P3HT semiconducting polymer in order to determine its influence on the bulk heterojunction morphology as well as on the optoelectronic characteristics of the device. We have systematically mapped out the phase diagram for different molecular weight P3HTs blended with PCBM and observed the presence of a eutectic composition, which shifts to higher content of P3HT for lower molecular weight P3HTs.

Mastering a double emulsion in a simple co-flow microfluidic to generate complex polymersomes.

We show that the production and the geometrical shape of complex polymersomes can be predicted by varying the flow rates of a simple microdevice using an empirical law which predicts the droplet size. This device is constituted of fused silica capillaries associated with adjusted tubing sleeves and T-junctions. Studying the effect of several experimental parameters, double emulsions containing a controlled number of droplets were fabricated.