Quasi-bound states in the continuum for deep subwavelength structural information retrieval for DUV nano-optical polarizers.

We demonstrate the retrieval of deep subwavelength structural information in nano-optical polarizers by scatterometry of quasi-bound states in the continuum (quasi-BICs). To this end, we investigate titanium dioxide wire grid polarizers for application wavelengths in the deep ultraviolet (DUV) spectral range fabricated with a self-aligned double-patterning process. In contrast to the time-consuming and elaborate measurement techniques like scanning electron microscopy, asymmetry induced quasi-BICs occurring in the near ultraviolet and visible spectral range provide an easily accessible and efficient probe mechanism.

Bound states in the continuum for optomechanical light control with dielectric metasurfaces.

We investigate a reconfigurable dielectric metasurface merging optomechanical interaction and quasi-bound states in the continuum promising for all-optical light control light. The surface consists of a dimerized high-contrast grating with a compliant bilayer structure. The optical forces induced by a control light field lead to structural deformations changing the optical response.

Line-edge roughness as a challenge for high-performance wire grid polarizers in the far ultraviolet and beyond.

High-performance nano-optical elements for application wavelengths in the ultraviolet spectral range often require feature sizes of only a few tens of nanometers where line edge roughness (LER) becomes a critical parameter for the optical performance. In this contribution, we explore the influence of LER on the optical performance of wire grid polarizers (WGP) in the far ultraviolet range. Therefore, we present a method, which uses the finite difference time domain method in combination with a comprehensive spatial frequency dependent LER model.